Fundamentals of Microfabrication and Nanotechnology, Third Edition

Author: Marc J. Madou
Edition: 3
Binding: Hardcover
ISBN: 0849331803

Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available.
Categories: Child development, Nanotechnology, Child development. Contributors: Marc J. Madou - Author. Format: Hardcover
Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufactu